Gas Distribution Systems

Kinetics gas distribution systems are used in microelectronic and solar manufacturing facilities throughout the world. A wide range of panels, cabinets and controllers can be configured into an engineered system to meet a client’s specific needs. Systems are available with either manual, semi-automatic, or fully automatic operation, depending on the specific process gas and fab operational requirements.

Our gas distribution products have a proven record for 200 and 300 mm wafer fabrication and also thin-film and silicon-based photovoltaic manufacturing. We also can design and manufacture a variety of gas purification and liquid-gas dispense systems, for custom manufacturing operations. All of the Kinetics gas systems are designed and manufactured under strict quality guidelines, routinely achieving over 99.999% uptime.

Our high-performance gas management products include: