MEGA® Clean Manual: Manual wet benches.


KINETICS MEGA® Clean Manual VLF Front Access Manual Wetbenches are compatible with Class 100 cleanrooms or higher. The open process area allows laminar air to flow over the work surface, catching particles and fumes and directing them out of the clean room through the exhaust slots. The open floor recirculates cleanroom air and reduces particle buildup under the system. The wet process stations are designed for full modularity, providing the flexibility to change processes with minimal downtime and cost.

System overview

  • Process tanks are recessed below decks which provide 360° lip outlet
  • Standard wet stations are manufactured from stress relieved polypropylene and/or 304 stainless steel
  • The DI water manifold is accessible through front access doors and all electrical components are easily accessible through head case doors
  • The electrical compartment is insulated and purged with nitrogen to prevent any corrosion from acidic fumes

  • The wet stations conform to most nationally recognized standards
  • Shell lengths of 24″, 36″, 48″, 72″ and 96″
  • Polypropylene or 304 stainless steel materials of construction
  • SEMI-S2 emergency stop mushroom switch and circuitry
  • Photohelic® emissions monitor with audible/visual alarms interlocked with emergency stop button
  • Level sensor with audible/visual alarm interlocked with emergency stop button
  • Main N2 and CDA pressure interlock with audible/visual alarms linked to emergency stop
  • N2 purged head housing
  • Cross outlet with 360° lip outlet
  • Clear PVC sliding shields
  • Teflon® N2 and DI guns
  • Polypropylene flow through the DI water manifold
  • Casters with leg adjusters

  • FM 4910 Approved Building Materials
  • Rear bench casing
  • Special drains and/or bottle systems
  • PVDF or Teflon® water distributor
  • PLC with touchscreen interface
  • FM-tested C2 fire detection and extinguishing system
  • SEMI and CE Mark or other third party NRTL testing and certification
  • HEPA/ULPA air filtration

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