Kinetics SD 100

System overview

The Kinetics SD 100 Slurry Dispense System is a reliable and configurable dispense system for critical slurry and CMP process applications. The system accommodates single or dual source containers, and dispenses pre-mixed slurry either to the CMP polisher tools, or to an optional day tank. The day tank accommodates contents of multiple supply drums, to ensure availability of slurry dispensed to the fab. Slurry is dispensed to the fab points-of-use using either diaphragm or magnetically levitated centrifugal pumps. Source and dispense loop circulation is used to prevent settling of slurry material. Optional transfer and dispense filters are available, to remove large slurry agglomerates. An optional automated filter flush-purge module is available to ensure seamless delivery of slurry material. The system is designed to minimize dead-legs, and uses high performance components proven to work in tough slurry environments. Userdefined flushing sequences keeps the system clean, and maintains the slurry for optimum process performance.

controls

  • Allen-Bradley SLC 500 or Siemens S7 series PLC
  • Allen-Bradley Panelview 550 or Siemens TP177B HMI, displaying:
    •  System P&ID status
    • Alarm and warning screens
    • Distribution valve box status
    • Pump and filter runtime screens
    • Password-protected maintenance screens
    • Manual activation of valves and pumps
  • Connectivity to factory control system

options

  • Stirrer devices for source drums and day tank

  • Magnetically-levitated centrifugal pump for slurry dispense

  • Single transfer filter

  • Single or dual-stage dispense filtration, with redundant filter paths

  • Automated DI water and N2 services for dispense filters

  • User-defined flushing/purging sequences

  • Day tank – 200, 500 or 1000 L

  • Automated back-pressure control for distribution loop

  • Source drum cabinet (single or dual)

  • Day tank cabinet, up to 500 L

  • Internal slurry sample valve

  • Bar code reader

Key features

  • Single or dual slurry source containers, typically 200 liter drums

  • 5 to 20 liter per minute dispense rate

  • Reliable diaphragm pump operation

  • Redundant pumping modules for uncompromised reliability

  •  Transfer and fab loop circulation, to prevent slurry settling.

  • Humidified N2 for blanketing of source containers and day tank

  • Polyethylene and polypropylene materials-of-construction

  • Polypropylene cabinet

Safety features

  • Segregated pumping compartments for online maintenance

  • Local and remote EMO

  • Cabinet leak detection and door interlocks

  • Audible and visual warnings and alarms

  • Options for exhaust and high-flow sensors

Process flow diagrams

Configuration showing two source drums, day tank, transfer and dispense filters, and drum/tank stirrers

Relaiability

  • MTBF > 4500 Hours¹

  • MTBA > 2500 Hours¹

  • MTTR < 2 Hours

  • Availability > 99.9%

¹Filter change-out not considered part of system down-time or repair time.