Kinetics CD 200

System overview

The Kinetics CD 200 Chemical Dispense System provides safe, pure and reliable distribution of process chemicals to critical semiconductor and photovoltaic process modules. The system features two independent pumping modules for operational redundancy. The primary pumping module distributes chemical to the factory and provides continuous filtration and recirculation to maintain very low particle levels. The secondary module is used for source container operations such as transferring chemical to the day tank and recirculation back to the source. The secondary pump module can also be used as back-up to dispense chemical to the factory during maintenance of the primary module. The CD 200 system is designed to provide the level of precision and robustness required for sensitive process operations..

Controls

  • Allen-Bradley SLC 500 or Siemens S7 series PLC
  • Allen-Bradley Panelview 550 or Siemens TP177B
  • HMI, displaying:
    • System P&ID status
    • Alarm and warning screens
    • Distribution valve box status
    • Pump and filter runtime screens
    • Password-protected maintenance screens
    • Manual activation of valves and pumps
  • Connectivity to factory control system

Options

  • Cabinets for source drums and day tank (up to 500L)
  • Fab-wide recirculation
  • Up to 3 chemical outlet valves
  • Automated maintenance services
  • Pump stroke counter and leak detection
  • Optional centrifugal pumps, for high-flow applications
  • Bar code reader
  • Stainless steel cabinet for solvents
  • Pressure & flow indicator on pump outlet
  • High-flow switch, for system shut-down
  • HEPA filtration module for drum cabinets, day tank cabinets and sample station
  • Lower cost polyethylene components, for non-critical processes

Key features

  • Two independent pumping modules
  • Flow rate configurations of 15, 30 and 50 liters per minute
  • Diaphragm pumps, with pulsation dampeners
  • Day Tank, for buffer storage capacity
  • Redundant chemical filter housings (10” or 20”)
  • Two circuits for chemical recirculation and polishing
  • Use of integrated valve bodies for reduced footprint and fewer leak-points
  • DI/N2 maintenance services for pumps and filters
  • DIW spray gun

Safety features

  • Segregated electrical and chemical compartments
  • Local and remote EMO
  • Cabinet leak detection and door interlocks
  • Audible and visual warnings and alarms
  • Options for exhaust and high-flow sensors
  • Optional cabinets for drums, IBC’s and day tank

Process flow diagrams

Configuration with redundant pumping modules

Reliability

  • MTBF > 6000 Hours
  • MTBA > 4500 Hours
  • MTTR < 2 Hours
  • Availability > 99.95%