Kinetics CB 200

System overview

Kinetics chemical blending systems provide a winning combination of blending accuracy and capacity required to meet a variety of process and productivity requirements. Based on proven weight-based blending technology, the Kinetics CB 200 is a high-capacity blending system, with a maximum blend capacity of 15,000 liters per day. The blending algorithm controls the quantity of chemical constituents introduced into each load cell-mounted blend tank. An optional flow-rate-based blending module is available, where each chemical is introduced by time into the blend tank at a pre-determined flow rate. The chemical blend is thoroughly mixed by recirculating through a pump and conductivity monitoring loop. The measured conductivity is continually compared to the pre-determined conductivity set-point, which has been calibrated to chemical concentration. The blend tank continues to circulate the mixture until the desired  concentration level is reached. Consisting of two (2) blend tanks and one or two day tanks, the CB 200 can continually blend chemical in one blend tank, while simultaneously transferring qualified blend to the day tank. For dispensing blended chemistry to the fab, the Kinetics CD 100 or CD 200 dispense system can be utilized alongside the chemical blending system.

controls

  • Allen-Bradley SLC 500 or Siemens S7 series PLC
  • Allen-Bradley Panelview 550 or Siemens TP177B HMI, displaying:
    • System P&ID status
    • Alarm and warning screens
    • Blend and flush recipe and calibration screens (password-protected)
    • Distribution valve box status
    • Maintenance screens (password-protected)
  • Connectivity to factory control system

options

  • Flow meter-based blending module

  • Alternative metrology packages – auto-titration, index of refraction, or sonic velocity

  • Cabinet for blend tanks, up to 500 L

  • Pump stroke and leak detection

  • Radar level sensor in day tank

  • Sampling compartment

Key features

  • Total blend capacity of 9000, 12,000 or 15,000 liters

  • High-accuracy load cells for precise blending

  • User-selected blend recipes

  • Absolute blend accuracy of 0.1, 0.01 or 0.003 weight percent, depending on specific configuration

  • Up to three (3) chemical constituents, plus DI water

  • Dual-cell conductivity monitor

  • Diaphragm or centrifugal blend circulation pumps

  • Polypropylene cabinet material

  • DI/N2 maintenance services for pumps and filters. DIW spray gun

Safety features

  • Segregated electrical and chemical compartments

  • Local and remote EMO

  • Cabinet leak detection and door interlocks

  • Audible and visual warnings and alarms

  •  Transparent door panels for viewing

Process flow diagrams

Configuration showing two weight-based blend tanks, online metrology, and a single day tank

Relaiability

  • MTBF > 4500 Hours

  • MTBA > 2500 Hours

  • MTTR < 2 Hours

  • Availability > 99.9%

System overview

The Kinetics CD 100 Chemical Dispense System is a simple, low-cost chemical transfer or dispense system. The unit pumps liquid chemical from drum or IBC source containers and distributes throughout the factory to various wet process tools. The system is very configurable, to provide the specific levels of flow and purity that meet your tool and process requirements.

controls

  • Allen-Bradley SLC 500 or Siemens series PLC
  • Simple, push-button system controls
  • Optional Allen-Bradley Panelview 550 or SiemensTP177B HMI, displaying:
    • System P&ID status
    • Alarm and warning screens
    • Distribution valve box status
    • Pump and filter runtime screens
    • Password-protected maintenance screens
    • Manual activation of valves and pumps
    • Connectivity to factory control system

options

  • Back-up pump for redundancy
  • Pulsation dampeners, for improved filter performance
  • Chemical filter housings (10” or 20”), with recirculation
  • DayTank, for buffer storage capacity
  • Day tank recirculation, for low particle levels
  • Fab-wide recirculation
  • Cabinets for source drums and day tank (up to 500L)
  • Up to 3 chemical outlet valves
  • Additional day tank nozzle for bulk feed
  • Pump stroke counter and leak detection
  • Bar code reader

Key features

  • Flow Rate configurations of 15, 30 and 50 liters per minute
  • Use of integrated valve bodies for reduced footprint
  • Polyethylene/polypropylene or fluoropolymer materials, depending on specific chemical and purity requirements
  • Polypropylene cabinet for acids and caustics
  • SS Cabinet for solvents
  • DI/N2 maintenance services for pumps and filters
  • DIW spray gun

Safety features

  • Segregated electrical and chemical compartments
  • Local and remote EMO
  • Cabinet leak detection
  • Cabinet door interlocks
  • Audible and visual warnings and alarms
  • Transparent door panels for viewing
  • Options for exhaust and high-flow sensors

Process flow diagrams

Configuration with source drum, single pump, single filter

Configuration with source IBC’s, redundant pumps, day tank, parallel filters

Relaiability

  • MTBF > 4500 Hours
  • MTBA > 2500 Hours
  • MTTR < 2 Hours
  • Availability > 99.9%