Process Media Distribution Systems

Kinetics masters the challenge of moving materials into, around, or out of a process environment at every juncture. An international install base of over 1,500 process media systems is proof that Kinetics is a wise choice when system specifications require a site-specific design: That’s because no two facilities or process flows are identical.

Once a process media system design is approved to fit a specific goal, budget, and timeline, Kinetics moves into manufacturing according to client and project standards. Installation and qualification follow to meet system metrics and comply with governing health and safety standards.

This rigorous, tested approach is channeled into chemical blend and delivery, slurry delivery, gas and UPW and water purification systems, and valve manifold boxes. Whether the need is confined to stages in a process or an entire line, Kinetics’ knowledge will dramatically increase the probability of success, with an eye on both budget and lead times.

Kinetics’ truly modular chemical delivery meets the widest array of process applications. Because modules are configurable, they fit new installation, replacement, and upgrade requirements.

By balancing advanced technology with proven performance, Kinetics provides a reliable approach to engineering, installation, operation, and maintenance. This broad and deep expertise ensures that every module contributes to overall process success.

Kinetics combines powerful, productive dispense technology with ergonomic maintenance features and a full range of flow/pressure capabilities to deliver chemical dispense tools tailored to individual needs across a broad spectrum of applications.

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Kinetics’ chemical blending and dilution system options built for both blending accuracy and capacity meet a variety of demanding fab process and productivity requirements.

Every system leverages proven, weight-based chemical-blending technology to achieve the highest blend accuracy levels possible. Optional flow-rate based blending modules are available for chemical blends requiring high make-up rates and lower accuracy levels.

A range of blend tank and day tank sizes provides optimal options for configuring systems to meet specific capacity and utilization requirements. Chemical metrology instruments are subsequently matched to specific process requirements to meet chemical blending standards over extended periods.

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Consistent with other process media distribution systems from Kinetics, slurry delivery systems are critical to the success of leading microelectronics companies worldwide. At the core is the ability to meet requirements with a sense of urgency while continuing to hold standards.

Kinetics supports the most demanding CMP planarization processes being performed today through considered design and agile manufacturing.  The key is planning for anticipated irregularities like materials variances, operating conditions, and personnel supervising the process.

Kinetics’ extensive experience in both designing and delivering high precision slurry systems is well documented. Whether delivering pre-mixed slurry materials or blending and dispensing extremely challenging slurry mixtures, Kinetics is prepared to respond. This includes highly critical oxide, tungsten, polysilicon, STI, and copper CMP slurry processes.

Kinetics gas distribution systems are deployed in microelectronic and solar manufacturing facilities worldwide. A wide range of panels, cabinets, and controllers are ready to be configured according to specific process gas and fab operational requirements. Systems can be engineering for manual, semi-automatic, or fully automatic operation.

Standardized, high-volume gas distribution systems are also available for 200- and 300-mm wafer fabrication, as well as thin-film and silicon-based photovoltaic manufacturing. Kinetics tools are well documented to ensure that quality and consistency are intrinsic to every system.

Kinetics designs and manufactures gas purification and liquid-gas dispense systems under strict quality guidelines to meet custom manufacturing. All of Kinetics gas systems achieve uptimes exceeding 99.999%.


THE LATEST

FLOWING TO THE CHALLENGE: Process media’s top obstacles

Turning process goals into efficient systems is the art of being intentional

As aspirational and leading edge as process engineers may want to be, the physical reality – and economic constraints – of handling materials is unavoidable. To anticipate the challenges ahead, Kinetics’ globally deployed teams’ start at the beginning with system design.

These systems comprise chemical and blend delivery, slurry delivery, gas and UPW and water purification systems as well as valve manifold boxes.  Across varied-but-connected design requirements are five guiding principles that put a sense of focus and intention at the center.

Principle #1: Safety, safety, and more safety.

The environmental integrity of media distribution systems – including operator and facility staff protection – are always a concern. Sometimes, intervention is needed to correct a problem. Here, ongoing situational awareness training for all staff is critical, as are buddy-system contingencies.

Principle #2: Performance metrics are the start, middle, and end.

Often, the impossible trinity of “faster-better-cheaper” is embedded in the expectations surrounding a step, stage, line or entire plant. Experience dictates that pinnacle metrics of any of these need to be dialed back by 2-7% to account for variances in materials, operating conditions, and control.

Principle #3: Avoid the assumption of too much system stability.

This has nothing to do with the efficacy of the design, quality of components, or competence of installation. Even with recently- or regularly-qualified materials, a combination of minor variances can affect output levels and quality. This requires system thinking, SWOT or GAP analysis, as well as contingencies attached to the team’s findings.

Principle #4: Triple-check the thinking around process control.

Even as artificial intelligence looms on the horizon, the ability of more sophisticated sensors, valves, temperature management, pressure level, and other controls to meet process goals has its limits. Determining the right balance between process and monitoring automation in harmony with operator intervention must be documented and defensible.

Principle #5: Assess the line’s agility and adaptability.

Dedicated systems must, intrinsically, carry some elasticity to adapt to even the slightest variances in the operating environment. Materials technology advances test the ability of any process to adapt and flow with changes. This capability must be designed into the initial system and calls for the extended team’s expertise to be evaluated on the basis of ability to anticipate and respond. This applies to both internal staff and outside contractors.

Email sales@kinetics.net to learn more about Kinetics’ ability to supply Process Media Distribution Systems.