MEGA Kinetics Fluid Systems

MEGA Kinetics Fluid Systems is our chemical and slurry delivery equipment subsidiary that serves the semiconductor, LED, pharmaceutical, specialty chemicals and solar/PV industries. MEGA’s product line complements Kinetics’ own legacy process media distribution systems.

MEGA’s world-class engineering, manufacturing and testing capabilities allow us to offer customers turnkey solutions from feasibility studies through design, construction, construction management, commissioning and closeout.

The MEGA Story

Originally a spin-out of Kinetics in 2004, Mega Fluid Systems served customers around the world as an independent company for 20 years. The company is well known for its state-of-the-art systems that deliver the most difficult and sensitive chemical mechanical planarization (CMP) chemistries and slurries to process tools. In 2018, Mega rejoined the Kinetics family, but maintains its own brand and product line.

MEGA Kinetics Fluid System Product Lines

The addition of MEGA product lines extends Kinetics’ CMP offerings to include: 


Mega is headquartered in Tualatin, Oregon, with sales and engineering offices in Saugerties, NY, Hsinchu, Taiwan, and a strong field service/engineering presence in Chandler, AZ.

World-wide Headquarters

9398 SW Tualatin-Sherwood Rd.
Tualatin, OR 97062
Phone 971.277.9000
Fax 971.277.9010