Quartz Tanks

Our Megatherm™ line of High Temperature Quartz Baths was developed for resist stripping and silicon nitride etching.

MEGATHERM RECIRCULATING BATH

The Megatherm™ High Temperature Quartz Recirculating bath is manufactured with pure fused quartz for low contamination environments and high temperature applications.

MEGATHERM HOTPOT/NITRIDE ETCH

The Megatherm™ High Temperature Quartz Hot Pot eas designed to deliver a low contamination and particle-free environment. The Megatherm™ Nitride Etch is used to selectively etch silicon nitride without etching the silicon dioxide.