Temperature Control
Temperature Regulators
Designed specifically for the semiconductor industry, the WHRV™ AND WHO™ Temperature Controlled Circulators are used to control temperature in filtered etch modules and other chemical tanks where temperature stability and uniformity is critical. The compact, one-piece design combines the heater, pump and chiller into one efficient, space-saving unit that can be placed in your service aisle or next to your wet bench. The circulation pumps are offered as a combination of heating and cooling machine or only as heating.
Properties
- Automatic filling and refilling of the reservoir
- Compact one-piece construction
- Two available compressors: ¼ or ½ hp
- Multiple heater sizes available: 1500W, 2000W or 3000W
- Combination heating/cooling units (WHRV)
- Heaters only (WHO)
- Temperature range: from 10°C to 40°C
- WHO temperature range from 41°C to 80°C
- Temperature control up to +/- 1°C
- Snap-action switch for over-temperature safety shutdown
- PVDF vessel with 304 stainless steel screw-in immersion heater
- Three level sensors (low, high and overfill)
- The MD-30 sealless magnetic drive pump delivers 3.5 gpm at 22′ H2O
- Can be operated from any controller or PLC
Microprocessor Based Temperature Control - 200 Series
The MPC-206 is a self-contained, fully programmable, microprocessor-based temperature controller configured exclusively for KINETICS. This controller is designed to operate the ChemKleen™ range of circulating and filter baths. The MPC-206 features a full PID control scheme, digital display and timer.
Properties
- 10-button membrane control panel allows the operator to easily set up controls and adapt the system to changing process needs
- The built-in timer can implement a count-up, count-down and count-through or freeze indication at the completion of timing sequences
- A type AJ thermocouple is used to record the bath temperature
- A solid state relay allows the controller to carry the heater load without the need for external components. The regulator features a chemical resistant Kydex housing to protect the electrical components from acidic fumes and splashes
- The WHRV heater and cooler run simultaneously to ensure accurate temperature control
- WHRV uses powerful compressors for rapid cool down and high heat dissipation
- The external process tank is heated or cooled by pumping tempered water through the heat exchanger coils
- The PVDF reservoir and safety shut-off circuits make it a safe and reliable alternative to TEFLON® electric immersion heaters in the bathroom