ChemKleen Center Feed™ recirculating and filter bath
The ChemKleen bath is primarily used for HF, BOE and KOH applications but can be used with most acids. KINETICS standard circulating and filter baths are available as complete units. They include the tank assembly with the removable four-sided cascaded internal weir, heat exchanger coils, pump/motor assembly with filter chamber, two polypropylene pneumatic drain valves, a clear PVC lid and retaining slots.
Properties
- Tank Construction: The KINETICS ChemKleen tank assembly can be manufactured from polypropylene, PVDF and many FM 4910 approved materials. Standard tanks are designed for single and dual wafer cassettes ranging in size from 100mm to 300mm. Custom tanks are also available
- Four-sided weir cage: Along with the dual distribution rails and large flow channel, the four-sided cascading internal weir with leveling screws provides the highest flow rates and uniform laminar flow achieved through the wafer carrier, resulting in better etch rates and the lowest particle counts in the process area
- Heat Exchange Coils: Polyethylene or TEFLON® heat exchangers are located outside of the process weir (outside the weir cage) to prevent contamination of the wafer tray. The heat exchange coils are spark tested and pressure tested to prevent even the smallest of leaks. Material selection depends on chemistry and temperatures
The custom filter chamber is constructed of virgin monomeric unfilled polypropylene or PVDF and features a removable cap that is Acme-threaded to prevent cross-over. The filter chamber is machined to fit any 10 inch open ended filter element that uses 222 o-rings. The pump/filter assembly is easily removed from the process tank, and the pump assembly quickly disconnects from the filter chamber to simplify maintenance and reduce downtime.
- Compact Submersible Pump: Custom designed pump motors that offer the highest power and torque in a compact size. Three pump motors are available (1/8, 1/3 and 1/2 hp). Each motor comes standard with a high-quality epoxy coating that is resistant to acid fumes and water spray.
