Kinetics GC 200

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System overview

The Kinetics GC 200 Gas Cabinet is a semi-automated gas dispensing system designed to provide an exhausted enclosure for the safe dispensing of toxic and hazardous gases used in semiconductor and photovoltaic manufacturing. The system is intended for corrosive, toxic and pyrophoric gases, where the release of these gases would create a severe hazard to humans and equipment. The system features manual vacuum-assisted N2 purging during the cylinder change process. Redundant safety features provide automatic system shut-down in the event of gas leaks or other emergency conditions.

controls

The Kinetics GC 200 Semi-Automatic Gas Cabinet features a simple PLC Controller, designed to:

  • Shut down gas flow under emergency conditions, including internal hardware conditions or an external EMO signal
  • Responds to a gas leak in the exhaust line
  • Indicates when a gas cylinder is empty

options

  • Hastelloy material within regulator for corrosive gases

  • Nitrogen purge panel, where regulated N2 is not available

  • Co-Axial tube connection, for corrosive and pyrophoric gases

  • Particle Filter, located after regulator, removes particles ≥ 0.003 μm

  • Gas Purifier (with integrated filter), located after regulator. Removes contaminants, such as H2O, CO2, O2, and CO to < 1 ppb

  • Excess gas flow sensors and automated cylinder valves, for added safety

  • Cylinder Scale, for determining an empty cylinder for liquid gases

  • Heater and Chiller assemblies, for specific liquid process gases

Key features

  • Automatic gas shut-off valve, for emergencies

  • Pressure gauges on high and low side of regulator

  • Accommodates one, two, or three gas cylinders

  • Manual, vacuum-assisted purging during cylinder changes

  • Safety shut-down upon over-pressurization

  • Water sprinkler for fire protection

Safety features

All Kinetics gas cabinets comply with applicable guidelines by:

  • OSHA, TGO, CE
  • Uniform Fire Code (UFC80) and National Fire
  • Protection Agency (NFPA 318)
  • Semi S2-0200
  • NRTL Listing

Process flow diagrams

Configuration with dual-cylinder operation and vacuum-assisted purging

Relaiability¹

  • Availability > 99.999 %
  • MTBF > 8000 Hours
  • MTBA > 6000 Hours
  • MTTR < 2 Hours

¹Reliability figures represent typical performance.