OWN THE FLOW: Slurry delivery is a hidden advantage of microelectronics leaders

Leadership in the globally competitive world of microelectronics starts with a dual mindset. It requires the ability to see the forest while counting — and harvesting — the trees. The combination of an outward-facing view and internal performance management is uncommon in the industry, and requires technology collaborators attuned to this duality.

With a literal world of process experience to bring forward, Kinetics applies its resources at both levels. Slurry delivery is one expression of a focus on mission-critical manufacturing systems (the ‘trees’) in microelectronics manufacturing. Maintaining and exceeding the requirements of chemical mechanical planarization (CMP) processes centers on anticipating irregularities.

Variables like materials variances, operating conditions, and personnel are factored into the slurry distribution platforms that are available from the minds of Kinetics. At least five expressions of performance-based systems move from delivery through filtration even as HVM gains a stronger hold inside dedicated plants.

FEED THE PROCESS: MEGA SD50 propels raw slurry to a Mega Slurry Blend and Distribution (SBD) system as its configuration continuously circulates it to and from two containers connected to the SBD system. Status indictors, alarms, and fail-safe operating protocols are automated to maximize uptime delivery.

CONTROL EVERY INPUT: MEGA SD100 shifts from a now-utilized tote or drum to a second container while an on-demand mode recycles one tote or drum through the loop to the host until demand is satisfied. Proper backpressure and flow rates to the blend system are tuned through manual modulation in the SD1000.

CONSIDER THE SOURCE: MEGA SF100 deploys three pairs of 20” filter bowl and head assemblies orchestrated to enable simultaneous filtration of blended slurry material from a single or double sources: A third set of filters allows cartridge change-out, while auto functions and alarms turn a burden into increased control.

GO GLOBAL: MEGA SF200 musters two filter banks to permit isolation of a single filter bank, cartridge change-out as required, and slurry delivery to the global loop supply if advantageous. Two successive 20” filter and bowl head assemblies on a single bank are built for the stage filtration of slurry in a trio of high-performance configurations.

GET SERIOUS WITH THE SERIES: MEGA SF300 allows single, parallel, or combination delivery with Models 101, 201, and 301. A pair of 20” filter and bowl head assemblies characterize the trio, as do automatic flow control valves along with a pressure gauge array to read filter inlet and outlet pressure.

So the question becomes, “Where from here?” As a growing list of industry-leading and award-winning Kinetics’ customers has demonstrated, the devil may be in the details; the same ones that vex underperformers and reward the visionary and vigilant. To turn slurry delivery into a strength, simply click info@kinetics.net now.